000 00502 a2200253 4500
001 716
020 _a0-8359-3092-02
041 _aeng
080 _a621.372:621.382 Ver
245 _aIntegrated circuit fabrication technology
250 _a
260 _aReston
260 _bReston Pub.,
260 _c1979
300 _ax,193 p.
300 _c23 cm
490 _a
100 _aVeronis, Andrew
700 _a
650 _a
650 _aIntegrated circuits
942 _cBK
942 _2UDC
999 _c804
_d804