000 00561 a2200253 4500
001 6152
020 _a0-306-40293-91
041 _aeng
080 _a621.382:620.179.1 Non:78
245 _aNondestructive evaluation of semiconductor materials and devices / edited by Jay N. Zemel
250 _a
260 _aNew York
260 _bPlenum Press,
260 _c1979
300 _axi,782 p.
300 _c24.5 cm
490 _a
100 _a
700 _a
650 _a
650 _aSemiconductors-Testing congresses
942 _cBK
942 _2UDC
999 _c7587
_d7587