| 000 | 00695 a2200277 4500 | ||
|---|---|---|---|
| 001 | 140447 | ||
| 020 | _a0-306-30841-X0 | ||
| 041 | _aeng | ||
| 080 | _a621.382 Ion:4:74 | ||
| 245 | _aIon implantation in semiconductors : science and technology / edited by Susumu Namba | ||
| 250 | _a | ||
| 260 | _aNew York | ||
| 260 | _bPlenum Press, | ||
| 260 | _c1975 | ||
| 300 | _axv,742 p. | ||
| 300 | _c24.5 cm | ||
| 490 | _aBSI 903 : part - A49 : 1984 | ||
| 100 | _a | ||
| 700 | _a | ||
| 650 | _a | ||
| 650 | _aIon implantation-Congresses | ||
| 650 | _aSemiconductors, Effect of radiation on-Congresses | ||
| 650 | _aMetals, Effect of radiation on-Congresses | ||
| 942 | _cBK | ||
| 942 | _2UDC | ||
| 999 |
_c75691 _d75691 |
||