000 00606 a2200277 4500
001 72725
020 _a0-7803-1055-119
041 _aeng
080 _a620.1:537.56 Gri
245 _aCold Plasma in materials fabrication : from fundamentals to applications
250 _a
260 _aNew York
260 _bIEEE
260 _c1994
300 _axii,257 p.
300 _c23.5 cm
490 _a
100 _aGrill, Alfred
700 _a
650 _a
650 _aPlasma engineering
650 _aLow temperature plasmas
650 _aManufacturing processes
942 _cBK
942 _2UDC
999 _c72682
_d72682