| 000 | 00583 a2200265 4500 | ||
|---|---|---|---|
| 001 | 49279 | ||
| 020 | _a0-89838-259-98 | ||
| 041 | _aeng | ||
| 080 | _a621.372:621.382 Kam | ||
| 245 | _aPolycrystalline silicon for integrated circuit applications | ||
| 250 | _a | ||
| 260 | _aBoston | ||
| 260 | _bKluwer Academic Pub., | ||
| 260 | _c1988 | ||
| 300 | _axii,290 p. | ||
| 300 | _c23 cm | ||
| 490 | _a | ||
| 100 | _aKamins, Ted | ||
| 700 | _a | ||
| 650 | _a | ||
| 650 | _aIntegrated circuits-Materials | ||
| 650 | _aSilicon-Electric properties | ||
| 942 | _cBK | ||
| 942 | _2UDC | ||
| 999 |
_c71301 _d71301 |
||