000 | 00788 a2200265 4500 | ||
---|---|---|---|
001 | 48268 | ||
020 | _a9 | ||
041 | _aeng | ||
080 | _a621.372:621.382 Int:1:87 | ||
245 | _aULSI science and technology : proceedings of the 1st international symposium on ultra large scale integration science, Philadelphia, 1987 | ||
250 | _a | ||
260 | _aPennington | ||
260 | _bElectrochemical Soc., | ||
260 | _c1987 | ||
300 | _axi,840 p. | ||
300 | _c23 cm | ||
490 | _a | ||
100 | _aInternational symposium on ultra large scale integration science and technology (1st : 1987 : Philadelphia) | ||
700 | _a | ||
650 | _a | ||
650 | _aUltra large scale integration-Congresses | ||
650 | _aMetal oxide semiconductors, complementary-Congresses | ||
942 | _cBK | ||
942 | _2UDC | ||
999 |
_c65872 _d65872 |