| 000 | 00788 a2200265 4500 | ||
|---|---|---|---|
| 001 | 48268 | ||
| 020 | _a9 | ||
| 041 | _aeng | ||
| 080 | _a621.372:621.382 Int:1:87 | ||
| 245 | _aULSI science and technology : proceedings of the 1st international symposium on ultra large scale integration science, Philadelphia, 1987 | ||
| 250 | _a | ||
| 260 | _aPennington | ||
| 260 | _bElectrochemical Soc., | ||
| 260 | _c1987 | ||
| 300 | _axi,840 p. | ||
| 300 | _c23 cm | ||
| 490 | _a | ||
| 100 | _aInternational symposium on ultra large scale integration science and technology (1st : 1987 : Philadelphia) | ||
| 700 | _a | ||
| 650 | _a | ||
| 650 | _aUltra large scale integration-Congresses | ||
| 650 | _aMetal oxide semiconductors, complementary-Congresses | ||
| 942 | _cBK | ||
| 942 | _2UDC | ||
| 999 |
_c65872 _d65872 |
||