000 00485 a2200253 4500
001 27052
020 _a0
041 _aeng
080 _a537.311.33 Sym
245 _aSYMP. ON DEFECTS IN SILICON; SAN FRANCISCO, MAY 8-13, 1983
250 _aELECTRO. S
260 _a
260 _bp.x, 648, 23 cm
260 _c
300 _a
300 _c
490 _a
100 _aBULLIS W.M.KIMERLING L.C. ED.
700 _a
650 _a
650 _a
942 _cBK
942 _2UDC
999 _c60445
_d60445