| 000 | 00756 a2200277 4500 | ||
|---|---|---|---|
| 001 | 47157 | ||
| 020 | _a0-931837-69-31 | ||
| 041 | _aeng | ||
| 080 | _a621.375.9:621.382 Las:87 | ||
| 245 | _aLaser and particle-beam chemical processing for microelectronics : symposium, Boston, Massachusetts, U.S.A., Dec. 1-3, 1987 / edited by Daniel J. Ehrlich, Gregg S. Higashi and Modest M. Oprysko | ||
| 250 | _a | ||
| 260 | _aPittsburgh | ||
| 260 | _bMaterials Research Society, | ||
| 260 | _c1988 | ||
| 300 | _axvii,509 p. | ||
| 300 | _c22.5 cm | ||
| 490 | _a | ||
| 100 | _a | ||
| 700 | _a | ||
| 650 | _a | ||
| 650 | _aLasers-Congresses | ||
| 650 | _aChemical processes-Congresses | ||
| 650 | _aParticle beams-Congresses | ||
| 942 | _cBK | ||
| 942 | _2UDC | ||
| 999 |
_c59581 _d59581 |
||