000 00615 a2200301 4500
001 136764
020 _a0-12-744750-43
041 _aeng
080 _a621.372:621.382 Wes
245 _aTantalum thin films
250 _a
260 _aLondon
260 _bAcademic Press,
260 _c1975
300 _axiii,436 p.
300 _c22.5 cm
490 _a
100 _aWestwood, W.D.
700 _aWaterhouse, N.
700 _aWilcox, P.S.
700 _a
650 _a
650 _aThin films
650 _aTantalum films
650 _aHybrid integrated circuits
942 _cBK
942 _2UDC
999 _c56751
_d56751