| 000 | 00589 a2200265 4500 | ||
|---|---|---|---|
| 001 | 95228 | ||
| 020 | _a3-527-30257-3 | ||
| 041 | _aeng | ||
| 080 | _a537.311.33Kor | ||
| 245 | _aSemiconductors for micro and nanotechnology : an introduction for engineers | ||
| 250 | _a | ||
| 260 | _aWeinheim | ||
| 260 | _bWiley-VCH | ||
| 260 | _c2002 | ||
| 300 | _a340 p. | ||
| 300 | _c24 cm | ||
| 490 | _a | ||
| 100 | _aKorvink, Jan G. | ||
| 700 | _aGreiner, Andreas | ||
| 700 | _a | ||
| 650 | _a | ||
| 650 | _aSemiconductors , Microstructures , Nanotechnology | ||
| 942 | _cBK | ||
| 942 | _2UDC | ||
| 999 |
_c45316 _d45316 |
||