| 000 | 00580 a2200265 4500 | ||
|---|---|---|---|
| 001 | 65873 | ||
| 020 | _a0-87849-670-X12 | ||
| 041 | _aeng | ||
| 080 | _a537.56:620.183 Pla | ||
| 245 | _aPlasma properties, deposition and etching / edited by J.J. Pouch and S.A. Alterovitz | ||
| 250 | _a | ||
| 260 | _a | ||
| 260 | _bAedermannsdorf : Trans Tech Pub., 1993 | ||
| 260 | _c1993 | ||
| 300 | _ax,742 p. | ||
| 300 | _c24.5 cm | ||
| 490 | _a | ||
| 100 | _a | ||
| 700 | _a | ||
| 650 | _a | ||
| 650 | _aPlasma etching | ||
| 650 | _aPlasma chemistry | ||
| 942 | _cBK | ||
| 942 | _2UDC | ||
| 999 |
_c42682 _d42682 |
||