000 00612 a2200265 4500
001 64755
020 _a3-211-82505-30
041 _aeng
080 _a621.385.832:681.3 Tec:1:93
245 _aTechnology CAD systems / edited by F. Fasching, S. Halama and S. Selberherr
250 _a
260 _a
260 _bWien : Springer-Verlag, 1993
260 _c1993
300 _aviii,309 p.
300 _c24 cm
490 _a
100 _a
700 _a
650 _a
650 _aComputer-aided design-Congresses
650 _aSemiconductors-Data processing-Congresses
942 _cBK
942 _2UDC
999 _c37965
_d37965