| 000 | 00523 a2200253 4500 | ||
|---|---|---|---|
| 001 | 1010912 | ||
| 020 | _a4-06-210667-1 | ||
| 041 | _aeng | ||
| 080 | _a621.382:669.782Its(2) | ||
| 245 | _aSiO2 in Si microdevices | ||
| 250 | _a | ||
| 260 | _aTokyo | ||
| 260 | _bKodansha/Springer-Verlag | ||
| 260 | _c2002 | ||
| 300 | _axiii,322 p. | ||
| 300 | _c24 cm | ||
| 490 | _aSpringer series in material science ; v.56 | ||
| 100 | _aItsumi, Manabu | ||
| 700 | _a | ||
| 650 | _a | ||
| 650 | _a | ||
| 942 | _cBK | ||
| 942 | _2UDC | ||
| 999 |
_c37071 _d37071 |
||