| 000 | 00628 a2200265 4500 | ||
|---|---|---|---|
| 001 | 41469 | ||
| 020 | _a0-12-234115-59 | ||
| 041 | _aeng | ||
| 080 | _a621.372:621.382 VLS-15 | ||
| 245 | _aVLSI electronics : microstructure science / edited by Norman G. Einspruch, Simon S. Cohen and Gennady Sh. Gildenblat | ||
| 250 | _a | ||
| 260 | _aOrlando | ||
| 260 | _bAcademic Press, | ||
| 260 | _c1987 | ||
| 300 | _av.15 | ||
| 300 | _c23.5 cm | ||
| 490 | _a | ||
| 100 | _a | ||
| 700 | _a | ||
| 650 | _a | ||
| 650 | _aMetallic films | ||
| 650 | _aIntegrated circuits-Very largescale integration | ||
| 942 | _cBK | ||
| 942 | _2UDC | ||
| 999 |
_c31448 _d31448 |
||