| 000 | 00545 a2200265 4500 | ||
|---|---|---|---|
| 001 | 89398 | ||
| 020 | _a0-8493-1262-0 | ||
| 041 | _aeng | ||
| 080 | _a621.382Lys | ||
| 245 | _aMEMS and NEMS : systems, devices and structures | ||
| 250 | _a | ||
| 260 | _aBoca Ratan | ||
| 260 | _bCRC Press | ||
| 260 | _c2002 | ||
| 300 | _a461 p. | ||
| 300 | _c24 cm | ||
| 490 | _a | ||
| 100 | _aLyshevski, Sergey Edward | ||
| 700 | _a | ||
| 650 | _a | ||
| 650 | _aElectronics | ||
| 650 | _aMicroelectromechanical systems | ||
| 942 | _cBK | ||
| 942 | _2UDC | ||
| 999 |
_c30659 _d30659 |
||