| 000 | 00718 a2200229 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20240722100659.0 | ||
| 008 | 240709b |||||||| |||| 00| 0 eng d | ||
| 020 | _a978-1-00-930358-3 | ||
| 040 | _cIITB | ||
| 041 | _aeng | ||
| 080 |
_a621.372:621.382 _bPlu |
||
| 100 |
_aPlummer, James D _eAuthor _956728 |
||
| 245 | _aIntegrated circuit fabrication : science and technology | ||
| 260 |
_aCambridge _bCambridge University Press _c2023 |
||
| 300 |
_axvi,661 p. _c26 cm |
||
| 650 | 0 |
_aElectronics _91686 |
|
| 650 | 0 |
_aIntegrated circuits _xDesign and construction _925746 |
|
| 650 | 0 |
_aSemiconductors _xDesign and construction _95793 |
|
| 700 |
_aGriffin, Peter B _eAuthor _957763 |
||
| 942 |
_2udc _cSB |
||
| 999 |
_c298941 _d298941 |
||