000 | 00697nam a2200229Ia 4500 | ||
---|---|---|---|
003 | OSt | ||
005 | 20230807122526.0 | ||
008 | 230607s9999 xx 000 0 und d | ||
020 | _a978-0-19-513605-0 | ||
040 | _cIITB | ||
041 | _aeng | ||
080 |
_a621.382 _bCam |
||
100 |
_aCampbell, Stephen A. _950124 _eAuthor |
||
245 | 0 | _aScience and engineering of microelectronic fabrication | |
250 | _a2nd ed. | ||
260 |
_aNew York _bOxford University Press _c2001 |
||
300 |
_axiv,603 p. _c23 cm |
||
440 |
_926243 _aThe Oxford series in electrical and computer engineering |
||
650 | 0 |
_91686 _aElectronics |
|
650 | 0 |
_95793 _aSemiconductors _xDesign and construction |
|
942 |
_cBK _2udc |
||
999 |
_c296939 _d296939 |