000 00697nam a2200229Ia 4500
003 OSt
005 20230807122526.0
008 230607s9999 xx 000 0 und d
020 _a978-0-19-513605-0
040 _cIITB
041 _aeng
080 _a621.382
_bCam
100 _aCampbell, Stephen A.
_950124
_eAuthor
245 0 _aScience and engineering of microelectronic fabrication
250 _a2nd ed.
260 _aNew York
_bOxford University Press
_c2001
300 _axiv,603 p.
_c23 cm
440 _926243
_aThe Oxford series in electrical and computer engineering
650 0 _91686
_aElectronics
650 0 _95793
_aSemiconductors
_xDesign and construction
942 _cBK
_2udc
999 _c296939
_d296939