| 000 | 00535 a2200253 4500 | ||
|---|---|---|---|
| 001 | 40815 | ||
| 020 | _a1 | ||
| 041 | _aeng | ||
| 080 | _a621.372:621.382 Rop | ||
| 245 | _aAnodic oxidation of silicon in a microwave plasma disk reactor | ||
| 250 | _a | ||
| 260 | _an.p. | ||
| 260 | _bMichigan State University, | ||
| 260 | _c1986 | ||
| 300 | _axiii,221p. | ||
| 300 | _c21cm | ||
| 490 | _a | ||
| 100 | _aRoppel, Thaddeus Adam | ||
| 700 | _a | ||
| 650 | _a | ||
| 650 | _aMetals-Anodic oxidation | ||
| 942 | _cBK | ||
| 942 | _2UDC | ||
| 999 |
_c28681 _d28681 |
||