000			01141 a2200337 4500
999			_c271284 _d271284
001			388674
003			OSt
005			20220610161827.0
008			180411b xxu||||| |||| 00| 0 eng d
040			_cIITB
041			_aeng
080			_a043:621-52:681.3 Dil
100			_aDileesh, P.V. _9190
245			_aMultiphysics modelling and simulation of electrostatically actuated microbeams using spectral element method (R)
260			_aMumbai
260			_bIIT
260			_c2018
300			_axviii,171 p.
300			_c30 cm
502			_aThesis _bPh.D. _cIndian Institute of Technology Bombay. Department of Mechanical Engineering _d2018
650		0	_aTheses and Dissertations _921
650		0	_aAutomatic control _9191
650		0	_aMicroelectromechanical systems _9192
650			_a Electrostatic apparatus and appliances _9193
650		0	_aFinite element methods _92489
650			_aMicroactuators _9195
700			_aPawaskar, D.N. _eSupervisor _9196
700			_aKulkarni, S.S. _eSupervisor _9197
710			_aIndian Institute of Technology Bombay. _bDepartment of Mechanical Engineering _9149
942			_cTD _2udc