| 000 | 00547 a2200253 4500 | ||
|---|---|---|---|
| 001 | 40138 | ||
| 020 | _a4 | ||
| 041 | _aeng | ||
| 080 | _a621.382 Rug | ||
| 245 | _aStructure and properties of silicon dioxide films thermally nitrided in pure ammonia | ||
| 250 | _a | ||
| 260 | _aPennsylvania | ||
| 260 | _bPennsylvania State University, | ||
| 260 | _c1986 | ||
| 300 | _a237 p. | ||
| 300 | _c20 cm | ||
| 490 | _a | ||
| 100 | _aRuggles, Gray Alan | ||
| 700 | _a | ||
| 650 | _a | ||
| 650 | _aSilicon dioxide | ||
| 942 | _cBK | ||
| 942 | _2UDC | ||
| 999 |
_c26433 _d26433 |
||