| 000 | 00604 a2200241 4500 | ||
|---|---|---|---|
| 001 | 316040 | ||
| 020 | _a | ||
| 041 | _aeng | ||
| 080 | _aLNBS SMT SP - 400 - 23 : 1976 | ||
| 245 | _aARPA / NBS workshop IV. surface analysis for silicon devices | ||
| 250 | _a | ||
| 260 | _aWashington, D.C. | ||
| 260 | _bNational Bureau of standards | ||
| 260 | _c1976 | ||
| 300 | _a238 p. | ||
| 300 | _c | ||
| 856 | _uNBS | ||
| 490 | _aNBS SMT SP - 400 - 23 : 1976 | ||
| 700 | _a | ||
| 650 | _a | ||
| 650 | _aAuger spectroscopy, Depth profiles, Electron beam induced imaging, ESCA, Insulator films | ||
| 942 | _cPP | ||
| 942 | _2UDC | ||
| 999 |
_c263340 _d263340 |
||