| 000 | 00569 a2200241 4500 | ||
|---|---|---|---|
| 001 | 306027 | ||
| 020 | _a | ||
| 041 | _aeng | ||
| 080 | _aLNBS SMT SP - 400 - 24 : 1974 | ||
| 245 | _aLaser Scanner for semiconductor devices | ||
| 250 | _a | ||
| 260 | _aWashington, D.C. | ||
| 260 | _bNBS | ||
| 260 | _c1977 | ||
| 300 | _a72 p. | ||
| 300 | _c | ||
| 856 | _uNBS | ||
| 490 | _aNBS SMT SP - 400 - 24 : 1974 | ||
| 700 | _a | ||
| 650 | _a | ||
| 650 | _aElectronic reliability, Electronics, Laser scanner, Measurement method, Semiconductor device studies | ||
| 942 | _cPP | ||
| 942 | _2UDC | ||
| 999 |
_c254545 _d254545 |
||