000 00567 a2200241 4500
001 306026
020 _a
041 _aeng
080 _aLNBS SMT SP - 400 - 27 : 1974
245 _aLaser scanning of active semiconductor devices
250 _a
260 _aIllinois
260 _bNational Bureau of standards
260 _c1976
300 _a26 p.
300 _c
856 _uNBS
490 _aNBS SMT SP - 400 - 27 : 1974
700 _a
650 _a
650 _aFailure analysis, Hot spots, Integrated circuits, Reliability, Transistors
942 _cPP
942 _2UDC
999 _c254543
_d254543