| 000 | 00569 a2200277 4500 | ||
|---|---|---|---|
| 001 | 60769 | ||
| 020 | _a0-306-44146-235 | ||
| 041 | _aeng | ||
| 080 | _a621.372:621.382 Bro | ||
| 245 | _aPhysics of micro/nano-fabrication | ||
| 250 | _a | ||
| 260 | _a | ||
| 260 | _bNew York : Plenum Press, 1992 | ||
| 260 | _c1992 | ||
| 300 | _axix,650 p. | ||
| 300 | _c25 cm | ||
| 490 | _a | ||
| 100 | _aBrodie, Ivor | ||
| 700 | _aMuray, Julius J | ||
| 700 | _a | ||
| 650 | _a | ||
| 650 | _aMicroelectronics | ||
| 650 | _aThin-film circuits | ||
| 942 | _cBK | ||
| 942 | _2UDC | ||
| 999 |
_c23143 _d23143 |
||