000 00705 a2200265 4500
001 345854
020 _a
041 _aeng
080 _a043:621.382Swa
245 _aHigh performance Ge junctions enabled by Cold/Hot ion implantation for beyond 22nm CMOS (R)
250 _a
260 _aMumbai
260 _bIIT
260 _c2013
300 _aix,29 p.
300 _c30 cm
490 _a
100 _aSwarnkar, Prashant
700 _aLodha, Saurabh
650 _aLodha, Saurabh
650 _aTheses and Dissertations
650 _aMetal oxide semiconductors , Complimentary , Metal oxide semiconductor field-effect transistors , Germanium-Electric properties
942 _cTD
942 _2UDC
999 _c230002
_d230002