000 | 00671 a2200265 4500 | ||
---|---|---|---|
001 | 345082 | ||
020 | _a | ||
041 | _aeng | ||
080 | _a043:621.793:669.782:539.23San | ||
245 | _aPreparation of thin films of wide bandgap microcrystalline silicon carbon alloy using hot wire chemical vapour deposition (R) | ||
250 | _a | ||
260 | _aMumbai | ||
260 | _bIIT | ||
260 | _c1998 | ||
300 | _a53 p. | ||
300 | _c28 cm | ||
490 | _a | ||
100 | _aSanjay Kumar | ||
700 | _aDusane, R.O. | ||
650 | _aDusane, R.O. | ||
650 | _aTheses and Dissertations | ||
650 | _aThin films , Silicon Carbide , Chemical vapour deposition | ||
942 | _cTD | ||
942 | _2UDC | ||
999 |
_c229152 _d229152 |