000 00671 a2200265 4500
001 345082
020 _a
041 _aeng
080 _a043:621.793:669.782:539.23San
245 _aPreparation of thin films of wide bandgap microcrystalline silicon carbon alloy using hot wire chemical vapour deposition (R)
250 _a
260 _aMumbai
260 _bIIT
260 _c1998
300 _a53 p.
300 _c28 cm
490 _a
100 _aSanjay Kumar
700 _aDusane, R.O.
650 _aDusane, R.O.
650 _aTheses and Dissertations
650 _aThin films , Silicon Carbide , Chemical vapour deposition
942 _cTD
942 _2UDC
999 _c229152
_d229152