| 000 | 00664 a2200265 4500 | ||
|---|---|---|---|
| 001 | 341496 | ||
| 020 | _a | ||
| 041 | _aeng | ||
| 080 | _a043:620.168.3:621.317.3Har | ||
| 245 | _aFabrication and characterization of microcantilever based sensor (R) | ||
| 250 | _a | ||
| 260 | _aMumbai | ||
| 260 | _bIIT | ||
| 260 | _c2013 | ||
| 300 | _axi,88 p. | ||
| 300 | _c30 cm | ||
| 490 | _a | ||
| 100 | _aHaridwaj, Apurvee | ||
| 700 | _aKhosla, N.K. and Venkataramani, N. | ||
| 650 | _aKhosla, N.K. and Venkataramani, N. | ||
| 650 | _aTheses and Dissertations | ||
| 650 | _aMicroelectromechanical systems-Materials , Microstructures | ||
| 942 | _cTD | ||
| 942 | _2UDC | ||
| 999 |
_c223858 _d223858 |
||