| 000 | 00681 a2200265 4500 | ||
|---|---|---|---|
| 001 | 339068 | ||
| 020 | _a | ||
| 041 | _aeng | ||
| 080 | _a043:669.782:621.793Pat | ||
| 245 | _aMechanical properties of amorphous hydrogenated silicon carbide thin films (R) | ||
| 250 | _a | ||
| 260 | _aMumbai | ||
| 260 | _bIIT | ||
| 260 | _c2013 | ||
| 300 | _av, 28 p. | ||
| 300 | _c30 cm | ||
| 490 | _a | ||
| 100 | _aPatrikar, Kalyani | ||
| 700 | _aDusane, R.O. and Pant, Prita | ||
| 650 | _aDusane, R.O. and Pant, Prita | ||
| 650 | _aTheses and Dissertations | ||
| 650 | _aSilicon-carbide thin films , Amorphous semiconductors , Chemical vapor deposition | ||
| 942 | _cTD | ||
| 942 | _2UDC | ||
| 999 |
_c219950 _d219950 |
||