| 000 | 00597 a2200265 4500 | ||
|---|---|---|---|
| 001 | 308857 | ||
| 020 | _a | ||
| 041 | _aeng | ||
| 080 | _a043:621.382:620.168Tya | ||
| 245 | _aFabrication and study of mems devices based on silicon carbide (R) | ||
| 250 | _a | ||
| 260 | _aMumbai | ||
| 260 | _bIIT | ||
| 260 | _c2012 | ||
| 300 | _a44 p, | ||
| 300 | _c30 cm | ||
| 490 | _a | ||
| 100 | _aTyagi, Devesh | ||
| 700 | _aDusane, R.O. | ||
| 650 | _aDusane, R.O. | ||
| 650 | _aTheses and Dissertations | ||
| 650 | _aMicroelectromechanical systems , Silicon carbide | ||
| 942 | _cTD | ||
| 942 | _2UDC | ||
| 999 |
_c217387 _d217387 |
||