| 000 | 00700 a2200265 4500 | ||
|---|---|---|---|
| 001 | 307517 | ||
| 020 | _a | ||
| 041 | _aeng | ||
| 080 | _a043:621.793:539.23San | ||
| 245 | _aFabrication of piezoresistive device for MEMS application using poly silicon thin films obtained by aluminium induced crystallization (R) | ||
| 250 | _a | ||
| 260 | _aMumbai | ||
| 260 | _bIIT | ||
| 260 | _c2012 | ||
| 300 | _aix,51 p. | ||
| 300 | _c30 cm | ||
| 490 | _a | ||
| 100 | _aSanagavarapu, Lavanya | ||
| 700 | _aDusane, R.O. | ||
| 650 | _aDusane, R.O. | ||
| 650 | _aTheses and Dissertations | ||
| 650 | _aPolycrystalline semiconductors , Silicon crystals , Thin films devices | ||
| 942 | _cTD | ||
| 942 | _2UDC | ||
| 999 |
_c216906 _d216906 |
||