000 00653 a2200265 4500
001 300753
020 _a
041 _aeng
080 _a043:621.744Mee
245 _aFabrication of PDMS arrayed micro structures using silicon etching LIGA (R)
250 _a
260 _aMumbai
260 _bIIT
260 _c2011
300 _axi,45 p.
300 _c30 cm
490 _a
100 _aMeena, Jagdish Prasad
700 _aJoshi, Suhas S. and Singh, Ramesh K.
650 _aJoshi, Suhas S. and Singh, Ramesh K.
650 _aTheses and Dissertations
650 _aSilicon-etching , Machine moulding(founding)
942 _cTD
942 _2UDC
999 _c214730
_d214730