000 00685 a2200265 4500
001 294354
020 _a
041 _aeng
080 _a043:621.382.3Aga
245 _aUnit process development for the fabrication of small channel length transistors (R)
250 _a
260 _aMumbai
260 _bIIT
260 _c2010
300 _aix,51 p.
300 _c30 cm
490 _a
100 _aAgarwal, Vanita
700 _aKottantharayil, Anil and Pinto, Richard
650 _aKottantharayil, Anil and Pinto, Richard
650 _aTheses and Dissertations
650 _aMetal oxide semiconductors field-effect transistors , Transistors
942 _cTD
942 _2UDC
999 _c209653
_d209653