| 000 | 00536 a2200241 4500 | ||
|---|---|---|---|
| 001 | 339650 | ||
| 020 | _a | ||
| 041 | _aeng | ||
| 080 | _aLNASA TN D 5866 : 1970 | ||
| 245 | _aMetallization systems for integrated circuits | ||
| 250 | _a | ||
| 260 | _aWashington, D.C. | ||
| 260 | _bNASA | ||
| 260 | _c1970 | ||
| 300 | _a23 p. | ||
| 300 | _c | ||
| 856 | _u | ||
| 490 | _aNASA TN D 5866 : 1970 | ||
| 700 | _a | ||
| 650 | _a | ||
| 650 | _aSingle metal systems, Multilevel metallization, Metallization-related failure | ||
| 942 | _cPP | ||
| 942 | _2UDC | ||
| 999 |
_c206770 _d206770 |
||