000 | 00616 a2200265 4500 | ||
---|---|---|---|
001 | 277259 | ||
020 | _a | ||
041 | _aeng | ||
080 | _a043:621.382.3:537.226Sat | ||
245 | _aSputtered hafnium dioxide as high-k dielectric for sub 100nm MOSFETs (R) | ||
250 | _a | ||
260 | _aMumbai | ||
260 | _bIIT | ||
260 | _c2009 | ||
300 | _av,34 p. | ||
300 | _c30 cm | ||
490 | _a | ||
100 | _aSatish Meena | ||
700 | _aPinto, R. | ||
650 | _aPinto, R. | ||
650 | _aTheses and Dissertations | ||
650 | _aMetal oxide semiconductor field-effect Transistors , Dielectrics | ||
942 | _cTD | ||
942 | _2UDC | ||
999 |
_c205901 _d205901 |