000 00637 a2200265 4500
001 267407
020 _a
041 _aeng
080 _a043:621.793:536.7Adh
245 _aThemodynamic and kinetic investigation of the HWCVD process (R)
250 _a
260 _aMumbai
260 _bIIT
260 _c2009
300 _axv,81 p.
300 _c30 cm
490 _a
100 _aAdhikari, Subhra
700 _aDusane, R.O. and Viswanathan, N.N.
650 _aDusane, R.O. and Viswanathan, N.N.
650 _aTheses and Dissertations
650 _aThermodynamics , Chemical vapour deposition
942 _cTD
942 _2UDC
999 _c204830
_d204830