| 000 | 00609 a2200241 4500 | ||
|---|---|---|---|
| 001 | 249311 | ||
| 020 | _a | ||
| 041 | _aeng | ||
| 080 | _aLNIST SP 400 - 100 : 1998 | ||
| 245 | _aThin film reference materials development final redport for CRADA CN-1364 | ||
| 250 | _a | ||
| 260 | _aGaithersburg | ||
| 260 | _bNational Institute of Standard and Technology | ||
| 260 | _c1998 | ||
| 300 | _a42 p. | ||
| 300 | _c28 cm | ||
| 856 | _u | ||
| 490 | _aNIST SP 400 - 100 : 1998 | ||
| 700 | _a | ||
| 650 | _a | ||
| 650 | _aCalibration, Ellipsometry, Metrology, Reference materials, Silicon dioxide | ||
| 942 | _cPP | ||
| 942 | _2UDC | ||
| 999 |
_c202853 _d202853 |
||