000 00620 a2200265 4500
001 231569
020 _a
041 _aeng
080 _a043:621.317.3:621.382Ram
245 _aCharacterization system for MEMS (R)
250 _a
260 _aMumbai
260 _bIIT
260 _c2006
300 _avi,35 p.
300 _c30 cm
490 _a
100 _aRam Mohan K.
700 _aRamgopal Rao, V. and Mukherji, S.
650 _aRamgopal Rao, V. and Mukherji, S.
650 _aTheses and Dissertations
650 _aMicroelectromechanical systems , Detectors , Biosensors
942 _cTD
942 _2UDC
999 _c196766
_d196766