| 000 | 00667 a2200265 4500 | ||
|---|---|---|---|
| 001 | 222768 | ||
| 020 | _a | ||
| 041 | _aeng | ||
| 080 | _a043:539.23:669.782Pat | ||
| 245 | _aMechanical characterization of amorphous silicon thin film alloy (R) | ||
| 250 | _a | ||
| 260 | _aMumbai | ||
| 260 | _bIIT | ||
| 260 | _c2005 | ||
| 300 | _axiii,60 p. | ||
| 300 | _c28 cm | ||
| 490 | _a | ||
| 100 | _aPatil, Vinod Pradip | ||
| 700 | _aDusane, Rajiv O. and Gandhi, Prasanna S. | ||
| 650 | _aDusane, Rajiv O. and Gandhi, Prasanna S. | ||
| 650 | _aTheses and Dissertations | ||
| 650 | _aThin films-Mechanical properties , Silicon devices | ||
| 942 | _cTD | ||
| 942 | _2UDC | ||
| 999 |
_c195042 _d195042 |
||