000 00673 a2200265 4500
001 222120
020 _a
041 _aeng
080 _a043:669.782:621.793Swa
245 _aStudy of hydrogenated amorphous silicon carbon (a-SiC:H) alloy film deposited by hot wire chemical vapor deposition (HWCVD) (R)
250 _a
260 _aMumbai
260 _bIIT
260 _c2006
300 _aviii,120 p.
300 _c28 cm
490 _a
100 _aSwain, Bibhu Prasad
700 _aDusane, Rajiv O.
650 _aDusane, Rajiv O.
650 _aTheses and Dissertations
650 _aChemical vapour deposition , Silicon alloys
942 _cTD
942 _2UDC
999 _c194834
_d194834