000 | 00673 a2200265 4500 | ||
---|---|---|---|
001 | 222120 | ||
020 | _a | ||
041 | _aeng | ||
080 | _a043:669.782:621.793Swa | ||
245 | _aStudy of hydrogenated amorphous silicon carbon (a-SiC:H) alloy film deposited by hot wire chemical vapor deposition (HWCVD) (R) | ||
250 | _a | ||
260 | _aMumbai | ||
260 | _bIIT | ||
260 | _c2006 | ||
300 | _aviii,120 p. | ||
300 | _c28 cm | ||
490 | _a | ||
100 | _aSwain, Bibhu Prasad | ||
700 | _aDusane, Rajiv O. | ||
650 | _aDusane, Rajiv O. | ||
650 | _aTheses and Dissertations | ||
650 | _aChemical vapour deposition , Silicon alloys | ||
942 | _cTD | ||
942 | _2UDC | ||
999 |
_c194834 _d194834 |