| 000 | 00650 a2200265 4500 | ||
|---|---|---|---|
| 001 | 216997 | ||
| 020 | _a | ||
| 041 | _aeng | ||
| 080 | _a043:621.317.3:621.793Rok | ||
| 245 | _aHWCVD silicon nitride based microsensor (R) | ||
| 250 | _a | ||
| 260 | _aMumbai | ||
| 260 | _bIIT | ||
| 260 | _c2005 | ||
| 300 | _av,46 p. | ||
| 300 | _c29 cm | ||
| 490 | _a | ||
| 100 | _aRokade, Harshal D. | ||
| 700 | _aApte, P.R. and Dusane R.O. | ||
| 650 | _aApte, P.R. and Dusane R.O. | ||
| 650 | _aTheses and Dissertations | ||
| 650 | _aChemical vapour deposition , Micromachining , Silicon nitride , Atomic force microscopy | ||
| 942 | _cTD | ||
| 942 | _2UDC | ||
| 999 |
_c193043 _d193042 |
||