| 000 | 00551 a2200253 4500 | ||
|---|---|---|---|
| 001 | 1539 | ||
| 020 | _a0 | ||
| 041 | _aeng | ||
| 080 | _a621.785.532 Cam | ||
| 245 | _aFactors influencing the formation of the ß-phase of silicon nitride during the nitridation of silicon | ||
| 250 | _a | ||
| 260 | _an.p. | ||
| 260 | _bUniversity of Leeds, | ||
| 260 | _c1976 | ||
| 300 | _a147 p. | ||
| 300 | _c29 cm | ||
| 490 | _a | ||
| 100 | _aCampos-Loriz, Diego | ||
| 700 | _a | ||
| 650 | _a | ||
| 650 | _aSilicon nitride | ||
| 942 | _cBK | ||
| 942 | _2UDC | ||
| 999 |
_c1872 _d1872 |
||