000 00710 a2200265 4500
001 95054
020 _a
041 _aeng
080 _a043:621.382.3Ran
245 _aNovel unit process development and their integration for sub-0.25 um MNSFET/MOSFET development (R)
250 _a
260 _aMumbai
260 _bIIT
260 _c2004
300 _axii,48 p.
300 _c30 cm
490 _a
100 _aRana, Amit Kumar
700 _aRao, V. Ramgopal and Dusane, Rajiv O.
650 _aRao, V. Ramgopal and Dusane, Rajiv O.
650 _aTheses and Dissertations
650 _aChemical vapour deposition , Metal oxide semiconductor field-effect transistors
942 _cTD
942 _2UDC
999 _c184548
_d184548