000 | 00661 a2200265 4500 | ||
---|---|---|---|
001 | 92604 | ||
020 | _a | ||
041 | _aeng | ||
080 | _a043:669.782:539.23Tri | ||
245 | _aFabrication of HWCVD microcrystalline silicon thin film transistors (R) | ||
250 | _a | ||
260 | _aMumbai | ||
260 | _bIIT | ||
260 | _c2004 | ||
300 | _ax,62 p. | ||
300 | _c30 cm | ||
490 | _a | ||
100 | _aTripathi, Swarnendu | ||
700 | _aDusane, R.O. and Venkataramani, N. | ||
650 | _aDusane, R.O. and Venkataramani, N. | ||
650 | _aTheses and Dissertations | ||
650 | _aChemical vapour deposition , Thin films , Silicon devices | ||
942 | _cTD | ||
942 | _2UDC | ||
999 |
_c181804 _d181804 |