000 00661 a2200265 4500
001 92604
020 _a
041 _aeng
080 _a043:669.782:539.23Tri
245 _aFabrication of HWCVD microcrystalline silicon thin film transistors (R)
250 _a
260 _aMumbai
260 _bIIT
260 _c2004
300 _ax,62 p.
300 _c30 cm
490 _a
100 _aTripathi, Swarnendu
700 _aDusane, R.O. and Venkataramani, N.
650 _aDusane, R.O. and Venkataramani, N.
650 _aTheses and Dissertations
650 _aChemical vapour deposition , Thin films , Silicon devices
942 _cTD
942 _2UDC
999 _c181804
_d181804