| 000 | 00632 a2200265 4500 | ||
|---|---|---|---|
| 001 | 92591 | ||
| 020 | _a | ||
| 041 | _aeng | ||
| 080 | _a043:669.782:539.23Kot | ||
| 245 | _aSynthesis and characterization of spin-coated low-k HSQ films (R) | ||
| 250 | _a | ||
| 260 | _aMumbai | ||
| 260 | _bIIT | ||
| 260 | _c2004 | ||
| 300 | _av,37 p. | ||
| 300 | _c30 cm | ||
| 490 | _a | ||
| 100 | _aKothari, Mayur | ||
| 700 | _aDusane, Rajiv O. | ||
| 650 | _aDusane, Rajiv O. | ||
| 650 | _aTheses and Dissertations | ||
| 650 | _aThin films , Hydrogen-Silsesquioxane , Silicon devices , Dielectric devices | ||
| 942 | _cTD | ||
| 942 | _2UDC | ||
| 999 |
_c181791 _d181791 |
||