000 00601 a2200277 4500
001 295411
020 _a0-8493-0077-0
041 _aeng
080 _a621.01(083)MEM
245 _aMEMS handbook (R)
250 _a
260 _aBoca Raton
260 _bCRC Press
260 _c2002
300 _avarious p.
300 _c26 cm.
490 _aMechanical engineering handbook series
700 _a
700 _aGad-el-Hak, Mohamed
700 _aGad-el-Hak, Mohamed
650 _a
650 _aMechanical Engg.
650 _aMechanical engineering-Handbooks
942 _cRB
942 _2UDC
999 _c177912
_d177912