| 000 | 00675 a2200289 4500 | ||
|---|---|---|---|
| 001 | 50318 | ||
| 020 | _a0 | ||
| 041 | _aeng | ||
| 080 | _a043:621.793:539.23Sur | ||
| 245 | _aPhoto assisted chemical vapor deposition of thin films of silicon nitride (R) | ||
| 250 | _a | ||
| 260 | _aBombay | ||
| 260 | _bIIT | ||
| 260 | _c1990 | ||
| 300 | _a110 p. | ||
| 300 | _c28 cm | ||
| 490 | _a | ||
| 100 | _aSuresh, K.B. | ||
| 700 | _aKulkarni, A.R. and Srinivasa, R.S. | ||
| 650 | _aKulkarni, A.R. and Srinivasa, R.S. | ||
| 650 | _aTheses and Dissertations | ||
| 650 | _aThin films | ||
| 650 | _aSilicon nitride | ||
| 650 | _aVapor-plating | ||
| 942 | _cTD | ||
| 942 | _2UDC | ||
| 999 |
_c167446 _d167446 |
||