000 00626 a2200277 4500
001 315166
020 _a978-1-4200-9052-9
041 _aeng
080 _a621.382:620.168.3Nan
245 _aNanofabrication handbook
250 _a
260 _aBoca Raton
260 _bCRC Press
260 _c2012
300 _axv,518 p.
300 _c28 cm
490 _a
700 _a
700 _aCabrini, Stefano
700 _aCabrini, Stefano
650 _a
650 _aElectronics
650 _aNanostructured materials-Handbooks, manuals, etc. , Nanostructures-Handbooks, manuals, etc.
942 _cBK
942 _2UDC
999 _c155765
_d155765