| 000 | 00604 a2200277 4500 | ||
|---|---|---|---|
| 001 | 283621 | ||
| 020 | _a978-0-85404-465-8 | ||
| 041 | _aeng | ||
| 080 | _a621.793:539.23Che | ||
| 245 | _aChemical vapour deposition : precursors, processes and applications | ||
| 250 | _a | ||
| 260 | _aCambridge | ||
| 260 | _bRSC Pub. | ||
| 260 | _c2009 | ||
| 300 | _axv, 582 p. | ||
| 300 | _c25.5 cm | ||
| 490 | _a | ||
| 700 | _a | ||
| 700 | _aJones, Anthoy C. | ||
| 700 | _aJones, Anthoy C. | ||
| 650 | _a | ||
| 650 | _aMetallization | ||
| 650 | _aChemical vapour deposition | ||
| 942 | _cBK | ||
| 942 | _2UDC | ||
| 999 |
_c151073 _d151073 |
||