000 00616 a2200289 4500
001 251992
020 _a978-0-387-29260-1
041 _aeng
080 _a539.23Alf
245 _aFundamentals of nanoscale film analysis
250 _a
260 _aNew York
260 _bSpringer
260 _c2007
300 _axiv,336 p.
300 _c24 cm
490 _a
100 _aAlford, Terry L.
700 _aFeldman, Leonard C.
700 _aMayer, James W.
700 _a
650 _a
650 _aPhysics
650 _aThin films , Nanomaterials , Thin films analysis
942 _cBK
942 _2UDC
999 _c147307
_d147307