000 00582 a2200265 4500
001 81988
020 _a0-7923-8224-26
041 _aeng
080 _a621.372:621.382 Kam
245 _aPolycrystalline silicon for integrated circuits and displays
250 _a2nd ed
260 _aBoston
260 _bKluwer Academic Pub.,
260 _c1998
300 _axv,378 p.
300 _c24 cm
490 _a
100 _aKamins, Ted
700 _a
650 _a
650 _aIntegrated circuits
650 _aPolycrystalline semiconductors
942 _cBK
942 _2UDC
999 _c114272
_d114272